<strong>Fifty shades of TiN: How deposition conditions influence the growth morphology and thereby hardness and especially fracture toughness</strong>

Presentation information

Parallel Sessions

ISSP / Surface Engineering

Thu. Sep 15, 2022 10:15 AM - 11:45 AM Room H (Meeting Room 204)

10:15 AM - 11:00 AM

*Paul H. Mayrhofer¹, Rainer Hahn¹, Balint Hajas¹, Alexander Kirnbauer¹ (1. TU Wien (Austria))

Keywords:TiN, deposition conditions, hardness, fracture toughness, growth morphology

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