[Thu-H1] ISSP / Surface Engineering

[Thu-H1-1K] Fifty shades of TiN: How deposition conditions influence the growth morphology and thereby hardness and especially fracture toughness

*Paul H. Mayrhofer¹, Rainer Hahn¹, Balint Hajas¹, Alexander Kirnbauer¹ (1. TU Wien (Austria))

キーワード：TiN, deposition conditions, hardness, fracture toughness, growth morphology