IVC-22

Presentation information

Print

Parallel Sessions

ISSP / Surface Engineering

[Thu-H2] ISSP / Surface Engineering

Thu. Sep 15, 2022 1:45 PM - 3:45 PM Room H (Meeting Room 204)

2:30 PM - 2:45 PM

[Thu-H2-3] Award Applied
Optical diagnostics of hot-target magnetron sputtering discharge

*Kseniia Leonova1, Nikolay Britun2, Stephanos Konstantinidis1 (1. ChIPS Lab., Univ. of Mons (Belgium), 2. cLPS Lab., Nagoya Univ. (Japan))

Keywords:magnetron sputtering, hot target, optical emission spectroscopy, pyrometry, thermionic emission

Please log in with your participant account.
» Participant Log In