[Thu-H2] ISSP / Surface Engineering

[Thu-H2-3] Award Applied
Optical diagnostics of hot-target magnetron sputtering discharge

*Kseniia Leonova¹, Nikolay Britun², Stephanos Konstantinidis¹ (1. ChIPS Lab., Univ. of Mons (Belgium), 2. cLPS Lab., Nagoya Univ. (Japan))

キーワード：magnetron sputtering, hot target, optical emission spectroscopy, pyrometry, thermionic emission