[Thu-H2] ISSP / Surface Engineering

[Thu-H2-5] Hollow Cathode Discharge Used for Silver Incorporation into Plasma Parylene Film for Antibacterial Purpose

*Ping-Yen Hsieh¹, Yu-Han Wei², Ying-Hung Chen¹, Ju-Liang He^1,2 (1. Institute of Plasma, Feng Chia University (Taiwan), 2. Department of Materials Science and Engineering, Feng Chia University (Taiwan))

キーワード：Hollow cathode discharge, Impulse plasma polymerization, Silver containing plasma parylene coating