IVC-22

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Parallel Sessions

Applied Surface Science

[Thu-J1] Applied Surface Science

Thu. Sep 15, 2022 10:15 AM - 12:00 PM Room J (Meeting Room 207)

11:45 AM - 12:00 PM

[Thu-J1-7] Effect of Atomic Hydrogen Exposure on Hydrogen-Free Amorphous Carbon Films

*Yuichi Haruyama1, Daiki Miromoto1, Akira Heya1, Koji Sumitomo1, Noriaki Toyoda1, Seigo Ito1 (1. University of Hyogo (Japan))

Keywords:Amorphous Carbon, Atomic Hydrogen Exposure

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