[Thu-J1] Applied Surface Science

[Thu-J1-7] Effect of Atomic Hydrogen Exposure on Hydrogen-Free Amorphous Carbon Films

*Yuichi Haruyama¹, Daiki Miromoto¹, Akira Heya¹, Koji Sumitomo¹, Noriaki Toyoda¹, Seigo Ito¹ (1. University of Hyogo (Japan))

キーワード：Amorphous Carbon, Atomic Hydrogen Exposure