IVC-22

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Parallel Sessions

Applied Surface Science

[Thu-J2] Applied Surface Science

Thu. Sep 15, 2022 1:45 PM - 3:45 PM Room J (Meeting Room 207)

2:30 PM - 2:45 PM

[Thu-J2-3] Basic evaluation and impurity analysis in OLED devices with new ion guns for Dynamic-SIMS

*Tomomi Ohashi1, Sakae Inayoshi1, Daisuke Sakai2, Takuya Miyayama2 (1. ULVAC, Inc. (Japan), 2. ULVAC PHI, Inc. (Japan))

Keywords:Impurity analysis, D-SIMS, Small area analysis, OLED device

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