[Thu-J2] Applied Surface Science

[Thu-J2-3] Basic evaluation and impurity analysis in OLED devices with new ion guns for Dynamic-SIMS

*Tomomi Ohashi¹, Sakae Inayoshi¹, Daisuke Sakai², Takuya Miyayama² (1. ULVAC, Inc. (Japan), 2. ULVAC PHI, Inc. (Japan))

キーワード：Impurity analysis, D-SIMS, Small area analysis, OLED device