IVC-22

Presentation information

Parallel Sessions

Scanning Probe Microscopy

[Tue-C2] Scanning Probe Microscopy

Tue. Sep 13, 2022 3:00 PM - 5:00 PM Room C (Mid-sized Hall A)

4:00 PM - 4:15 PM

[Tue-C2-3] Dual Bias Modulation Electrostatic Force Microscopy on n-type Si/Si Junctions Fabricated by Surface-activated Bonding

*Daichi Kobayashi1, Naoteru Shigekawa3, Jianbo Liang3, Takuji Takahashi1,2 (1. Institute of Industrial Science, The University of Tokyo (Japan), 2. Institute for Nano Quantum Information Electronics, The University of Tokyo (Japan), 3. Graduate School of Engineering, Osaka Metropolitan University (Japan))

Keywords:Scanning probe microscopy, Electrostatic force microscopy, Surface-activated bonding

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