[Tue-D1] Joint session of Non-Evaporable Getter Coating and Vacuum Science and Technology -- Fundamental Research and Characterization

[Tue-D1-1K] Overview of the NEG coating technology and recent R&D

*Pedro Costa Pinto¹ (1. CERN (Switzerland))

キーワード：Non Evaporable getters, NEG, Thin films, coatings, secondary electron emission, SEY, Distributed pumping