[Tue-D1] Joint session of Non-Evaporable Getter Coating and Vacuum Science and Technology -- Fundamental Research and Characterization

[Tue-D1-3] Performance of the NEG coated titanium vacuum chamber

*Junichiro Kamiya¹, Nariaki Okubo¹, Kaoru Wada^1,2 (1. Japan Atomic Energy Agency (Japan), 2. Tokyo Electronics Co., Ltd. (Japan))

キーワード：NEG coating, Titanium, Getter