[Tue-D1] Joint session of Non-Evaporable Getter Coating and Vacuum Science and Technology -- Fundamental Research and Characterization

[Tue-D1-5] Evaluation of Conflat Flange Zero-Length Nonevaporable Getter (NEG) Pumps Manufactured by Oxygen-Free Pd/Ti Deposition

*Kazuhiko Mase^1,2, Masato Ono³, Yuta Sato⁴, Kazuo Yoshioka³, Ichiro Yoshikawa³, Shinya Ohno⁴, Takashi Kikuchi¹, Yoshihiro Kato⁵, Hiromu Nishiguchi⁶ (1. IMSS, KEK (Japan), 2. SOKENDAI (Japan), 3. Univ. of Tokyo (Japan), 4. Yokohama National Univ. (Japan), 5. Irie Koken Co., Ltd. (Japan), 6. Baroque International Inc. (Japan))

Keywords:Nonevaporable getter coating, Vacuum pump, Palladium, Titanium, Conflat flange