[Tue-D1] Joint session of Non-Evaporable Getter Coating and Vacuum Science and Technology -- Fundamental Research and Characterization

[Tue-D1-5] Evaluation of Conflat Flange Zero-Length Nonevaporable Getter (NEG) Pumps Manufactured by Oxygen-Free Pd/Ti Deposition

*Kazuhiko Mase^1,2, Masato Ono³, Yuta Sato⁴, Kazuo Yoshioka³, Ichiro Yoshikawa³, Shinya Ohno⁴, Takashi Kikuchi¹, Yoshihiro Kato⁵, Hiromu Nishiguchi⁶ (1. IMSS, KEK (Japan), 2. SOKENDAI (Japan), 3. Univ. of Tokyo (Japan), 4. Yokohama National Univ. (Japan), 5. Irie Koken Co., Ltd. (Japan), 6. Baroque International Inc. (Japan))

キーワード：Nonevaporable getter coating, Vacuum pump, Palladium, Titanium, Conflat flange