[Tue-D1] Joint session of Non-Evaporable Getter Coating and Vacuum Science and Technology -- Fundamental Research and Characterization

[Tue-D1-6] International Standardization of Testing Methods for Pumping Performance of Non-evaporable Getters

*Hajime Yoshida¹ (1. AIST, NMIJ (Japan))

キーワード：Non-evaporable getter, NEG, Standardization