IVC-22

Presentation information

Parallel Sessions

ISSP / Surface Engineering

[Tue-E2] ISSP / Surface Engineering

Tue. Sep 13, 2022 3:00 PM - 4:30 PM Room E (Meeting Room 107+108)

3:00 PM - 3:45 PM

[Tue-E2-1K] Industrial Applications and Future of High Power Impulse Magnetron Sputtering

*Arutiun P. Ehiasarian1, Papken Eh. Hovsepian1 (1. Sheffield Hallam University (UK))

Keywords:High Power Impulse Magnetron Sputtering (HIPIMS), plasma surface engineering, nanoscale multilayer materials, ionised PVD, transition metal nitrides

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