[Tue-E2] ISSP / Surface Engineering

[Tue-E2-1K] Industrial Applications and Future of High Power Impulse Magnetron Sputtering

*Arutiun P. Ehiasarian¹, Papken Eh. Hovsepian¹ (1. Sheffield Hallam University (UK))

キーワード：High Power Impulse Magnetron Sputtering (HIPIMS), plasma surface engineering, nanoscale multilayer materials, ionised PVD, transition metal nitrides