<strong>Morphology and Piezo-enhanced Thermoelectric Properties of ZnO Nanocrystal Films from Precursor Flow Rate-interrupted Atomic Layer Deposition</strong>

3:15 PM - 3:30 PM

[Tue-G2-3] Morphology and Piezo-enhanced Thermoelectric Properties of ZnO Nanocrystal Films from Precursor Flow Rate-interrupted Atomic Layer Deposition

*FU-HSIANG KO¹, SHANG-YU TSAI¹ (1. NATIONAL YANG MING CHIAO TUNG UNIVERSITY)

Keywords:thermoelectric, Atomic Layer Deposition, ZnO nanocrystal film, grain boundaries, Piezo-enhanced

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