[Tue-H2] Plasma Science and Technologies

[Tue-H2-4] Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O₂/Ar capacitively coupled plasma

*Kunihiro KAMATAKI¹, Akihiro Yamamoto¹, Iori Nagao¹, Yuma Yamamoto¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naoto Yamashita¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu University (Japan), 2. NINS (Japan))

Keywords:TEOS-PECVD, nanoparticle, AM discharge, electric field