Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O2/Ar capacitively coupled plasma

Kunihiro KAMATAKI

16:00 〜 16:15

[Tue-H2-4] Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O₂/Ar capacitively coupled plasma

*Kunihiro KAMATAKI¹, Akihiro Yamamoto¹, Iori Nagao¹, Yuma Yamamoto¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naoto Yamashita¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu University (Japan), 2. NINS (Japan))

キーワード：TEOS-PECVD, nanoparticle, AM discharge, electric field

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講演情報

[Tue-H2] Plasma Science and Technologies

[Tue-H2-4] Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O₂/Ar capacitively coupled plasma

講演情報

[Tue-H2] Plasma Science and Technologies

[Tue-H2-4] Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O2/Ar capacitively coupled plasma

[Tue-H2-4] Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O₂/Ar capacitively coupled plasma