[Tue-I1] Data-driven materials science and process informatics

[Tue-I1-5] Information on organic materials obtained from the energy-per-atom dependent mass spectrum of Ar cluster SIMS

*Kousuke Moritani¹, Ken Mizuhata¹, Tetsuro Masumoto¹, Tomomichi Nakamura¹, Norio Inui¹ (1. University of Hyogo (Japan))

Keywords:TOF-SIMS, cluster ion beam, community analysis