[Tue-PO1A] Poster Session (17:00-18:30) Category A

[Tue-PO1A-7] Award Applied
Extraction characteristics of a DC reactive magnetron sputtering plasma source using Ar - H₂O plasma

*Allen Vincent Barabona Catapang¹, James Edward II Hernandez¹, Magdaleno Jr Vasquez², Motoi Wada¹ (1. Doshisha University (Japan), 2. University of the Philippines - Diliman (Philippines))

Keywords:Reactive Magnetron Sputtering, Water Vapor Plasma, Zinc Oxide