[Tue-PO1A] Poster Session (17:00-18:30) Category A

[Tue-PO1A-13] Effect of the substrate position on chemical states of the deposited films with benzene as a source during plasma CVD

*Masanori Shinohara¹, Tatsuo Nakai¹, Atsuya Kuwada¹, Ryo Sasamoto¹ (1. Fukuoka Univ (Japan))

Keywords:benzene plasma, deposition , sustrate position, chemical states