IVC-22

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Poster Session

Poster Session (17:00-18:30)

[Tue-PO1A] Poster Session (17:00-18:30) Category A

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Poster A (Main Hall)

[Tue-PO1A-18] Crystallinity Improvement of Zinc Oxide Films at Low Temperature Deposition Using Reactive HiPIMS

*Md. Suruz Mian1, Miho Hagino1, Rie Kawahigashi1, Takeo Nakano1, Kunio Okimura2 (1. Seikei Univ. (Japan), 2. Tokai Univ. (Japan))

Keywords:Low temperature Deposition, ZnO, HiPIMS, VO2

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