IVC-22

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Poster Session

Poster Session (17:00-18:30)

[Tue-PO1A] Poster Session (17:00-18:30) Category A

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Poster A (Main Hall)

[Tue-PO1A-19] Influence of gas species on characteristics of High-Power Pulsed Sputtering plasma

*Taishin Sato1, Shoki Abe1, Katsuyuki Takahashi1,2, Seiji Mukaigawa1, Koichi Takaki1,2 (1. Iwate university (Japan), 2. Agri-innovation center, Iwate university (Japan))

Keywords:Penning discharge, HiPIMS, Glow discharge

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