[Tue-PO1B] Poster Session (17:00-18:30) Category B

[Tue-PO1B-4] Hydrogen depth profiles of hydrogenated amorphous silicon double layers on crystalline silicon

*Kazuhiro Gotoh¹, Kazuma Inoue¹, Naomi Sawamoto², Tappei Nishihara², Markus Wilde³, Satoru Miyamoto¹, Yasuyoshi Kurokawa¹, Atsuhi Ogura², Katsuyuki Fukutani³, Noritaka Usami¹ (1. Nagoya University (Japan), 2. Meiji University (Japan), 3. The University of Tokyo (Japan))

Keywords:Electronic Materials and Processing, Thin Films, Heterointerfaces