[Tue-PO1C] Poster Session (17:00-18:30) Category C

[Tue-PO1C-1] Award Applied
Investigation and removal technique for the bonding state of surface contamination in SEM

*Natsuko ASANO¹, Morihiko ONOSE², Tomoko NUMATA², Shunsuke ASAHINA¹ (1. JEOL Ltd. (Japan), 2. HORIBA TECHNO SERVICE co, Ltd. (Japan))

Keywords:Scanning electron microscope, Contamination, Auger electron spectroscope, Micro Raman spectrometer, Chemical bonding