[Tue-PO1C] Poster Session (17:00-18:30) Category C

[Tue-PO1C-25] Award Applied
Non-destructive spectral analysis of Al_xGa_1-xN films by synchrotron soft X-ray photoelectron spectromicroscopy

*Shingo Takezawa^1,5, Roki Kohama², Zhang Wenxiong³, Hirokazu Fukidome², Issei Watanabe⁴, Masataka Imura⁵, Shunsuke Tsuda⁵, Masato Kotsugi¹, Naoka Nagamura^1,5,6 (1. Tokyo University of Science (Japan), 2. Tohoku University (Japan), 3. The University of Tokyo (Japan), 4. NICT (Japan), 5. NIMS (Japan), 6. JST PRESTO (Japan))

Keywords:Photoelectron spectroscopy, Wide-gap semiconductors, Synchrotron radiation