IVC-22

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Poster Session

Poster Session (17:00-18:30)

[Tue-PO1C] Poster Session (17:00-18:30) Category C

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Poster C (Main Hall)

[Tue-PO1C-28] In-situ heat treatment of Al stacking AZO thin films for low resistivity

*Naoya Koga1, Hisao Makino2 (1. Graduate School of Engineering, Kochi University of Technology (Japan), 2. Department of Electronic and Photonic Systems Engineering, Kochi University of Technology (Japan))

Keywords:XPS, Interface, TCO

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