[Tue-PO1C] Poster Session (17:00-18:30) Category C

[Tue-PO1C-28] In-situ heat treatment of Al stacking AZO thin films for low resistivity

*Naoya Koga¹, Hisao Makino² (1. Graduate School of Engineering, Kochi University of Technology (Japan), 2. Department of Electronic and Photonic Systems Engineering, Kochi University of Technology (Japan))

キーワード：XPS, Interface, TCO