[Tue-PO1C] Poster Session (17:00-18:30) Category C

[Tue-PO1C-33] Comparative Study of Atomic Hydrogen Exposure on Hydrogenated and Hydrogen-Free Amorphous Carbon Films

*Yuichi Haruyama¹, Daiki Morimoto¹, Akira Heya¹, Koji Sumitomo¹, Noriaki Toyoda¹, Seigo Ito¹ (1. University of Hyogo (Japan))

キーワード：Amorphous Carbon, Atomic Hydrogen Exposure