IVC-22

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Poster Session

Poster Session (17:00-18:30)

[Tue-PO1D] Poster Session (17:00-18:30) Category D

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Poster D (Main Hall)

[Tue-PO1D-12] Properties of Hf thin films sputtered in different gas species

*Kazuhisa Suzuki1, Midori Kawamura1, Takayuki Kiba1, Yoshio Abe1 (1. Kitami Inst. Tech. (Japan))

Keywords:Hf thin film, Sputtering, Krgas, Crystalline orientation, Electrical resistivity

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