[Tue-PO1E] Poster Session (17:00-18:30) Category E

[Tue-PO1E-2] Examination of cleanliness of organic EL film forming equipment

*Jun Watanabe¹, Kenta Suzuki¹, kazumasa Horita¹, Sakae Inayoshi¹ (1. ULVAC, Inc. (Japan))

キーワード：examination of cleanliness, Ion Chromatography, organic EL film forming equipment, residual ion analysis and impurity reduction, organic EL devices