IVC-22

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Poster Session

Poster Session (17:00-18:30)

[Tue-PO1E] Poster Session (17:00-18:30) Category E

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Room E (Main Hall)

[Tue-PO1E-8] Fabrication Method of Y2O3 Coated Filament

*Yuki Anai1, Toru Okuno1, Munenori Suzuki1, Tomonari Tanaka1 (1. ULVAC, Inc. (Japan))

Keywords:electron sources, ion sources, vacuum measurements, vacuum gauges, filaments, Y2O3, yttria, iridium, electrophoretic deposition, EPD

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