IVC-22

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Poster Session

Poster Session (17:00-18:30)

[Tue-PO1E] Poster Session (17:00-18:30) Category E

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Room E (Main Hall)

[Tue-PO1E-10] Remote Plasma Optical Emission Spectroscopy & Automated Analysis of Vacuum Processes Using Artificial Intelligence

*Dermot Patrick Monaghan1, Joseph Brindley1, Benoit Daniel1, Victor Bellido1 (1. Gencoa Ltd (UK))

Keywords:Residual Gas Analysis, Remote plasma OES, AI, Automated vacuum checking, Vacuum Quality Analysis

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