IVC-22

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Poster Session

Poster Session (17:00-18:30)

[Tue-PO1E] Poster Session (17:00-18:30) Category E

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Room E (Main Hall)

[Tue-PO1E-15] moved to online session
Pumping properties of Zirconium getter films

*Chin Shueh1, Che Kai Chan1, Yuan Ming Hsiao1, Bo Ying Chen1, Yan Hong Gao1, Yu Tsun Chen1, Chia Mu Cheng1, Yi Chen Yang1, Chin Chun Chang1 (1. National Synchrotron Radiation Research Center (Taiwan))

Keywords:Zirconium, Getter film, NEG

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