[Wed-B1] Surface Science

[Wed-B1-6] Award Applied
Pattern etching of silicon assisted by graphene oxide in a vapor phase combined with micro-contact printing

*Wataru Kubota¹, Ryoya Yamaoka¹, Toru Utsunomiya¹, Takashi Ichii¹, Hiroyuki Sugimura¹ (1. Kyoto University (Japan))

Keywords:Silicon etching, Graphene Oxide, Catalyst, Assisted-etching, Micro-contact printing