IVC-22

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Parallel Sessions

Non-Evaporable Getter Coating

[Wed-D1] Non-Evaporable Getter Coating

Wed. Sep 14, 2022 2:00 PM - 4:00 PM Room D (Mid-sized Hall B)

2:30 PM - 2:45 PM

[Wed-D1-2] Performance evaluation of Turbo Molecular Pump by Direct Simulation Monte Carlo method (DSMC)

*Kaoru Wada1, Junichiro Kamiya2 (1. Tokyo Electronics Co., Ltd. (Japan), 2. Japan Atomic Energy Agency (Japan))

Keywords:Turbo Molecular Pump

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