[Wed-D1] Non-Evaporable Getter Coating

[Wed-D1-4] Sputter Ion Pump with Mesh Anodes

*Taekyun Ha¹, Chong-Do Park¹, Sehyun Kim¹, Man-Soo Hong¹, Hyuck-Chae Kwon¹, Hyung Giun Kim², Hyung-Ki Park² (1. Pohang Accelerator Laboratory (Korea), 2. Korea Institute of Industrial Technology (Korea))

キーワード：Sputter Ion Pump, Pumping Speed, Gas Conductance, 3D Printing