IVC-22

Presentation information

Parallel Sessions

Non-Evaporable Getter Coating

[Wed-D1] Non-Evaporable Getter Coating

Wed. Sep 14, 2022 2:00 PM - 4:00 PM Room D (Mid-sized Hall B)

3:00 PM - 3:15 PM

[Wed-D1-4] Sputter Ion Pump with Mesh Anodes

*Taekyun Ha1, Chong-Do Park1, Sehyun Kim1, Man-Soo Hong1, Hyuck-Chae Kwon1, Hyung Giun Kim2, Hyung-Ki Park2 (1. Pohang Accelerator Laboratory (Korea), 2. Korea Institute of Industrial Technology (Korea))

Keywords:Sputter Ion Pump, Pumping Speed, Gas Conductance, 3D Printing

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