IVC-22

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Parallel Sessions

Non-Evaporable Getter Coating

[Wed-D1] Non-Evaporable Getter Coating

Wed. Sep 14, 2022 2:00 PM - 4:00 PM Room D (Mid-sized Hall B)

3:45 PM - 4:00 PM

[Wed-D1-7] Integration of Zr-V getter films in MEMS packaging

Sylvain Lemettre1, Clément Bessouet1, Charlotte Kutyla1, *Alain Bosseboeuf1, Philippe Coste1, Thierry Sauvage2, Hélène Lecoq2, Olivier Wendling2, Aurélien Bellamy2, Johan Moulin1 (1. C2N Nanored (France)、2. CEMHTI (France))

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