[Wed-E1] Science and Technologies for SDGs

[Wed-E1-6] Interface Characterization on an All-Solid-State Battery by XPS, AES, and Multi-Technique Surface Analyses

Masahiro Terashima¹, Kazutoshi Mamiya¹, *Masahiro Terashima¹, Shunsuke Sasaki², Atsuo Ono², Takahito Kimoto², Katsumi Watanabe¹, Shin-ichi Iida¹ (1. ULVAC-PHI, Inc. (Japan), 2. ULVAC (Japan))

キーワード：Auger Electron Spectroscopy, X-ray Photoelectron Spectroscopy, All-Solid-State Battery, LiPON, Surface Analysis