IVC-22

Presentation information

Parallel Sessions

Thin Film

[Wed-G1] Thin Film

Wed. Sep 14, 2022 2:00 PM - 4:00 PM Room G (Small Hall)

2:00 PM - 2:15 PM

[Wed-G1-1] Influence of sputtering gas species on electrical resistivity of Au and Pt thin films

*Fumito Hayasaka1, Midori Kawamura1, Takayuki Kiba1, Yoshio Abe Abe1 (1. Kitami Institute of Technology (Japan))

Keywords:sputtering deposition, mass difference, resistivity, Au, Kr

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