[Wed-G1] Thin Film

[Wed-G1-1] Influence of sputtering gas species on electrical resistivity of Au and Pt thin films

*Fumito Hayasaka¹, Midori Kawamura¹, Takayuki Kiba¹, Yoshio Abe Abe¹ (1. Kitami Institute of Technology (Japan))

Keywords:sputtering deposition, mass difference, resistivity, Au, Kr