[Wed-G1] Thin Film

[Wed-G1-7] Reactive sputter deposition of β-Ni(OH)₂ thin films using H₂O as a reactive gas and substrate cooling to −80 °C

*Yoshio Abe¹, Masaki Kataoka¹, Yuki Yokoiwa¹, Midori Kawamura¹, Kyung Ho Kim¹, Takayuki Kiba¹ (1. Kitami Inst. Technol. (Japan))

Keywords:reactive sputtering, nickel hydroxide thin film, electrochromic smart window, substrate cooling, aging effect