[Wed-H1] ISSP / Surface Engineering

[Wed-H1-5] Award Applied
Moving toward burst regime in high-power impulse hollow cathode sputtering - An optical absorption spectroscopy study -

*Kanta Mori¹, Nikolay Britun², Ming Yang¹, Tetsuhide Shimizu¹ (1. Tokyo Metropolitan University (Japan), 2. Nagoya University (Japan))

キーワード：Hollow cathode sputtering, High power pulsed discharge, Optical absorption spectroscopy, Nanoparticles