IVC-22

Presentation information

Poster Session

Poster Session (12:30-14:00)

[Wed-PO1D] Poster Session (12:30-14:00) Category D

Wed. Sep 14, 2022 12:30 PM - 2:00 PM Poster D (Main Hall)

[Wed-PO1D-5] Titanium oxide films containing nitrogen fabricated by plasma-assisted deposition using nitrogen monoxide gas

*Takahisa ICHINOHE1, Hideki OHNO1 (1. National Institute of Technology, Tokyo College (Japan))

Keywords:titanium oxide containing nitrogen, plasma-assisted deposition, multi-capillary

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