Deposition of zinc nitride film by a sheet plasma device

Presentation information

Poster Session

Poster Session (12:30-14:00)

Wed. Sep 14, 2022 12:30 PM - 2:00 PM Poster D (Main Hall)

*Hirotaka Tatematsu¹, Yoshiyuki Matsui¹, Motoi Wada¹ (1. Graduate School of Science and Engineering Doshisha University (Japan))

Keywords:Sheet plasma, zinc nitride

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