[Wed-PO1E] Poster Session (12:30-14:00) Category E

[Wed-PO1E-5] moved to online session
A new type of standard leak elements fabricated by femtosecond laser micromachining and its applications

*Che-Kai Chan¹, Chin-Chun Chang¹, I-Chen Yang¹, Chih-Wei Luo², Ching-Shiang Hwang^1,2 (1. National Synchrotron Radiation Research Center (Taiwan), 2. National Yang Ming Chiao Tung University (Taiwan))

Keywords:standard leak element, conductance, femtosecond laser micromachining, molecular flow