IVC-22

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Poster Session

Poster Session (12:30-14:00)

[Wed-PO1E] Poster Session (12:30-14:00) Category E

Wed. Sep 14, 2022 12:30 PM - 2:00 PM Room E (Main Hall)

[Wed-PO1E-10]
moved to online session Award Applied
Promoting Atomic Layer Deposition from Small-sized Substrates to Large-size Special-shaped Substrate

*Liangge Xu1 (1. Harbin Institute of Technology (China))

Keywords:ALD, Uniformity

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